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Elimination of dendrite formation during metal/chalcogenide glass deposition
Elimination of dendrite formation during metal/chalcogenide glass deposition
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机译:消除金属/硫族化物玻璃沉积过程中枝晶的形成
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摘要
A method of forming a programmable conductor memory cell array is disclosed wherein metal and chalcogenide glass are co-sputtered to fill an array of cell vias in a prepared substrate. The prepared substrate is heated above room temperature before the metal and chalcogenide glass film is deposited, and the heating is maintained throughout the deposition. The resulting metal/chalcogenide glass film has good homogeneity, a desired ratio of components, and has a regular surface.
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