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Semiconductor run-to-run control system with missing and out-of-order measurement handling
Semiconductor run-to-run control system with missing and out-of-order measurement handling
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机译:半导体运行对运行控制系统,缺少和乱序的测量处理
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摘要
A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, storing at least one measurement of the process output in the database aligned with each process input using the timestamp, iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, predicting the missing measurements for the database based on a model, and determining an error for calculating a next process input, the error based on the data in the database.
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