EMISSIVITY CORRECTED RADIATION PYROMETER INTEGRAL WITH A REFLECTOMETER AND ROUGHNESS SENSOR FOR REMOTE MEASURING OF TRUE SURFACE TEMPERATURES

摘要

An instrument that measures reflectivity, temperature and roughness of a substrate in a processing chamber remotely, without interfering with the process. The roughness of the substrate is estimated on the basis of depolarization measurements. The instrument automatically corrects for emissivity changes.