WAFER CARRIER TO IMPROVE PRODUCTIVITY BY INSTALLING WAFER MAPPING SENSOR AND WAFER ALIGNING SENSOR SIMULTANEOUSLY

摘要

Purpose: a wafer-supporting platform is arranged to increase productivity in the assembly line of an automation, by one chip figure placement sensor of identical installation and a wafer alignment sensor. Construction: a wafer-supporting platform (50) is for carrying and storing wafer. Wafer-supporting platform includes multiple pocket slots, chip figure placement sensor and wafer alignment sensor. A large amount of pocket slots (52) are for holding chip. Chip figure placement sensor (56) is installed in each pocket slot to identify wether, and chip exists, or not. Wafer alignment sensor includes an optical receiving sensor (54h) and a luminescence sensor (54l).