MATERIAL SENSOR WITH ARRAYED FILM BULK ACOUSTIC RESONATORS FOR PROVIDING LOW-PRICED AND SMALL-SIZED SENSORS

摘要

PURPOSE: A material sensor with arrayed film bulk acoustic resonators is provided to provide a small-sized sensor at a low cost by forming the arrayed film bulk acoustic resonators on a single chip. CONSTITUTION: A material sensor with arrayed film bulk acoustic resonators includes a first electrode, a second electrode, and electric generation material(50). The first electrode is divided into a plurality of intercepts. Each intercept is connected to each other in a predetermined area. The first electrode has an electrode for connecting to an external device. The second electrode is divided into a plurality of intercepts having the same shape as that of the intercepts of the first electrode. Each intercept of the second electrode has each electrode. The electric generation material is positioned between the first electrode and the second electrode. The first electrode is a lower electrode(30) or an upper electrode(40), and the second electrode corresponds to the other party of the first electrode.