Illumination implement for circuit structure manufacture on circuit board, using photomask exposing circuit structure image on circuit board, in which illumination member is formed by number of punctiform light sources on support plate

摘要

The illumination module produces circuit structure on circuit board, which is illuminated via photomask deposited on circuit board. The illuminator (1) consists of numerous punctiform light sources (2) on support plate (7). Preferably the illuminator is in form of light source field, or a light source line and may have allocated to it a scanner for photomask deposited on circuit board. The light sources may be electroluminescent or laser diodes. The support plate may also be a circuit board.