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procedures for the application of a schutzlacks on a wafer
procedures for the application of a schutzlacks on a wafer
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机译:在晶片上施加舒茨拉克斯的步骤
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摘要
A method for applying a protective resist, such as a negative resist, to a prepatterned wafer in which the resist is applied to the previously generated patterns by a distribution system which includes a holder for the wafer, an xy sliding unit with a programming device, and a dispensing device with a syringe.
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