A method for depositing a metal oxide - thin film on a glass substrate, so a coated glass substrate no

摘要

The invention relates to a method of depositing a layer based on metal oxide containing fluorine, in particular, a layer of tin oxide doped with fluorine sno2: f, on a glass substrate by a technique of the gaseous phase pyrolysis from at least two precursors of which at least one metal precursor and at least one precursor of fluor.selon the invention, the fluorine precursor comprises nitrogen trifluoride nf3.