PROBLEM TO BE SOLVED: To provide a fixed flange for a wafer chamfering grinding stone capable of improving working precision by a simple constitution, a flange removal tool, and a grinding stone mounting method of a wafer chamfering apparatus.;SOLUTION: The fixed flange 10 for the wafer chamfering grinding stone is formed with a hole 18 fitted to a motor rotary shaft 40 of a tapered shape so formed as to reduce a diameter toward the tip from its base at its center. The hole 18 has a tapered shape which is roughly the same tapered shape as that of the motor rotary shaft. A shaft 17 wherein the wafer chamfering grinding stone is fitted is formed on the circumference part of the fixed flange for the wafer chamfering grinding stone. A position adjustment means capable of moving the fixed flange for the wafer chamfering grinding stone in the radial direction of the motor rotary shaft is formed between the motor rotary shaft and the fixed flange for the wafer chamfering grinding stone. The relative position of the motor rotary shaft and the fixed flange for the wafer chamfering grinding stone is changed by the position adjustment means, thereby enabling the wafer chamfering grinding stone afferent with respect to the motor rotary shaft.;COPYRIGHT: (C)2005,JPO&NCIPI
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