METHOD FOR MANUFACTURING CARRIED TYPE PALLADIUM FILM USED FOR PURIFYING HIGH-PURITY HYDROGEN GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a carried type palladium film used for purifying high-purity hydrogen gas.;SOLUTION: The manufacturing method comprises the steps of: providing a porous stainless steel tube for a support; filling the support with a metal; forming the palladium film thereon by electroless plating the support in a palladium salt solution; and subsequently forming the palladium film on the above support by using a DC sputtering technique.;COPYRIGHT: (C)2005,JPO&NCIPI