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FOCUSING-POINT POSITION DETECTING METHOD, FOCUSING-POINT POSITION DETECTOR, DROPLET OBSERVING METHOD, DROPLET OBSERVING DEVICE, AND DROPLET DISCHARGING DEVICE
FOCUSING-POINT POSITION DETECTING METHOD, FOCUSING-POINT POSITION DETECTOR, DROPLET OBSERVING METHOD, DROPLET OBSERVING DEVICE, AND DROPLET DISCHARGING DEVICE
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机译:焦点位置检测方法,焦点位置检测器,液滴观察方法,液滴观察装置以及液滴排出装置
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摘要
PROBLEM TO BE SOLVED: To provide a focusing-point position detecting method and a focusing-point position detector for accurately, rapidly, and easily detecting a focusing-point position of laser beams by a simple structure, to provide a droplet observing method and a droplet observing device for accurately and easily observing a droplet discharged from a droplet discharging head, and to provide a droplet discharging device.;SOLUTION: This focusing-point position detector 3 is equipped with a light screening plate 4 having a pin hole 41 on an optical axis Ax of a focusing lens 27, a linear motor 11 for moving the screening plate 4 in the direction of the optical axis Ax, a linear encoder 12 for detecting the position of the screening plate 4, light receiving elements 71 and 72 for receiving the laser beams 233 and 234, and a focusing-point position detecting means for detecting the positions of a focusing point C of the laser beams 233 and 234 based on output signals of the receiving elements 71 and 72 and on positional information on the screening plate 4 detected by the linear encoder 12 with the screening plate 4 moved in the direction of the optical axis Ax by actuating the linear motor 11.;COPYRIGHT: (C)2005,JPO&NCIPI
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