GAP ADJUSTING DEVICE FOR HYDROSTATIC GAS BEARING PAD AND HYDROSTATIC GAS BEARING MECHANISM USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a gap adjusting device for a hydrostatic gas bearing pad and a hydrostatic gas bearing mechanism using the device capable of fixing a setting state without fluctuating an adjusted state after adjusting a gap, namely, the setting state and easily carrying out a fixing operation and also mounting on a small space.;SOLUTION: The hydrostatic gas bearing mechanism 1 comprises a plurality of hydrostatic gas bearing pads 4 lying between a movable body 2 and a fixed body 3 so that the movable body 2 is movably retained against the fixed body 3 in the X direction, and the gap adjusting device 6 mounted on the fixed body 3 corresponding to each hydrostatic gas bearing pad 4.;COPYRIGHT: (C)2005,JPO&NCIPI