METHOD FOR INTRODUCING HETERO-ATOMS INTO DIAMOND, DIAMOND, TRANSISTOR ELEMENT USING DIAMOND, ELECTRON EMITTING ELEMENT, AND LIGHT EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain a technique for controlling the concentration of hetero-atoms and introducing the atoms while avoiding damage of a diamond which can control semiconductor electron transfer characteristics, and also to realize an electronic element which can use the diamond as an electron transfer material.;SOLUTION: In a hetero-atoms introducing method for generating ions, extracting the ions from an ion source, mass separating the ions, converging the ions, deflecting the ions, decelerating the ions, and irradiating a diamond substance with the ions to introduce the hetero-ions into the substance; a vacuum container for applying the ions has a vacuum level of 1×10^-6 Pa or less, and the diamond is irradiated with the ions other than the constituent elements of the diamond at an energy level of 100eV or less.;COPYRIGHT: (C)2005,JPO&NCIPI