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The discharge source which has the gas curtain which protects optical system from the debris particle

机译:具有气幕的放电源,该气幕可保护光学系统免受碎屑影响

摘要

A gas curtain device is employed to deflect debris that is generated by an extreme ultraviolet and soft x-ray radiation discharge source such as an electric discharge plasma source. The gas curtain device projects a stream of gas over the path of the radiation to deflect debris particles into a direction that is different from that of the path of the radiation. The gas curtain can be employed to prevent debris accumulation on the optics used in photolithography.
机译:使用气幕装置来偏转由极紫外和软X射线辐射放电源(例如放电等离子体源)产生的碎屑。气幕装置将气体流投射在辐射的路径上,以将碎屑颗粒偏转到与辐射的路径不同的方向。可以使用气幕来防止碎屑堆积在光刻中使用的光学器件上。

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