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Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements
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机译:同时测量多个入射角的孤立和非周期性结构分析
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摘要
A method is disclosed for evaluating isolated and aperiodic structure on a semiconductor sample. A probe beam from a coherent laser source is focused onto the structure in a manner to create a spread of angles incidence. The reflected light is monitored with an array detector. The intensity or polarization state of the reflected beam as a function of radial position within the beam is measured. Each measurement includes both specularly reflected light as well as light that has been scattered from the aperiodic structure into that detection position. The resulting output is evaluated using an aperiodic analysis to determine the geometry of the structure.
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