首页>
外国专利>
Trapped charge field bias vibrating beam accelerometer
Trapped charge field bias vibrating beam accelerometer
展开▼
机译:陷获电荷场偏置振动梁加速度计
展开▼
页面导航
摘要
著录项
相似文献
摘要
A mechanical resonator having an electrical charge buried and substantially permanently trapped in a layer of insulating material grown or otherwise formed on either or both of the electrode and the vibratory beam, whereby the trapped electrical charge generates electrostatic forces between the beams and the electrodes of the opposing plates of the resultant capacitor.
展开▼