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ENVIRONMENTALLY FRIENDLY PHOTOACID GENERATORS (PAGS) WITH NO PERFLUOROOCTYL SULFONATES (PFOS)
ENVIRONMENTALLY FRIENDLY PHOTOACID GENERATORS (PAGS) WITH NO PERFLUOROOCTYL SULFONATES (PFOS)
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机译:无全氟磺酰磺酸(PFOS)的环保型光生酸剂(PAGS)
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摘要
Novel classes of ionic photoacid generator (PAGs) compounds having relatively environmentally friendly anions with no perfluorooctyl sulfonate (no-PFOS) are provided and photoresist composition that comprise such compounds. The new PAGs produce a photoacid having a short or no perfluoro alkyl chain (ie., no-PFOS) attached to a variety of functional groups. The PAGs of the invention are useful as photoactive component in the chemically amplified resist compositions used for microfabrication.
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