MICRO ACTUATOR, VARIABLE OPTICAL ATTENUATOR INCLUDING THE SAME AND FABRICATING METHOD THEREOF, PARTICULARLY CONCERNED WITH MEMS OPTICAL ATTENUATOR CAPABLE OF GUARANTEEING HIGH DRIVING FORCE BY USING ADDITIONAL DIELECTRIC LAYER

摘要

PURPOSE: A micro actuator, a variable optical attenuator including the same, and a fabricating method thereof are provided to increase the capacitance by depositing a dielectric layer on a lateral part opposite to a first pectinate part of a movable electrode unit and a second pectinate part of a fixing electrode unit. CONSTITUTION: A variable optical attenuator includes a substrate, an optical transmitting terminal, an optical receiving terminal, a movable electrode unit, a fixing electrode unit, and an optical shield layer. The substrate(110) has a flat surface. The optical transmitting terminal(115a) and the optical receiving terminal(115b) are aligned on the surface of the substrate so that optical axes of the terminal can be identical with each other. The movable electrode unit(130) includes a first pectinate part formed so as to be shifted vertically with respect to the optical axis. The fixing electrode unit(120a,120b) is fixed on the substrate and includes a second pectinate part coupled to the first pectinate part. The optical shield layer(140) is electrically connected to the first pectinate part. A dielectric layer(145) is formed on a lateral part opposite to the first and the second pectinate parts.