MULTI-STAGE FOR A SUBSTRATE INSPECTING APPARATUS, PARTICULARLY FOR INSPECTING SUBSTRATES OF VARIOUS SIZES ON A SINGLE STAGE WITHOUT ALTERNATION OF SUBSTRATE FIXING ELEMENTS OR THE STAGE

摘要

PURPOSE: A multi-stage for a substrate inspecting apparatus is provided to inspect substrates of various sizes on a single stage without alternation of fixing elements or the stage, thereby reducing the cost and time required for alternating the fixing elements or the stage by making positions of the fixing elements changeable according to substrate size. CONSTITUTION: A multi-stage for a substrate inspecting apparatus comprises a quadrangle frame(21), plural position variable units installed on the quadrangle frame, and fixing elements installed in the position change units. The position variable units are changeably positioned according to the size of a substrate to be inspected. The fixing elements fix and unfix the edges of the substrate. Each of the position variable units has the first and the second guide members, the first and the second moving plates(243,253) respectively coupled to the first and the second guide members, and the first and the second driving units for driving the first and the second moving plates. The first and the second moving plates move along the first and the second guide members.