Arrangement for highly precise positioning and measuring of objects placed on an object table, e.g. for use in producing microstructures in semiconductor manufacturing, has an interferometer block and measurement mirrors

摘要

Arrangement for precise positioning and measuring of objects placed on an object table whereby in a positioning volume beneath the object table (1) is an interferometer block (25) that is made up of two partial blocks whereby each block contains at least an interferometer. Measurement reflectors (20-22) of the interferometer are arranged on the inner surfaces (23, 24) of the object table and the closing plate.