Process for depositing thin layers on an organic substrate used in the production of flat displays comprises feeding a carrier gas into a gas flow sputtering source , and feeding the gas stream produced onto the substrate being coated

摘要

Process for depositing thin layers (9) on an organic substrate (10) comprises feeding a carrier gas into a gas flow sputtering source having a target (5) partially made from the material being deposited, and feeding the gas stream (8) produced onto the substrate being coated. An independent claim is also included for a device for depositing thin layers on an organic substrate.