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LIQUID-PHASE LASER ABLATION APPARATUS

机译:液相激光烧蚀装置

摘要

PROBLEM TO BE SOLVED: To provide a liquid-phase laser ablation apparatus, little in lowering of an ablation efficiency and possible to produce a good finely pulverized particle in a stable state.;SOLUTION: The liquid-phase laser ablation apparatus has a target 25 having a component to be finely pulverized, a laser oscillating apparatus 4 discharging a target component as the finely pulverized particle in the state of an atom, molecule, ion or cluster by irradiating a laser light 5 to the target 25, and a reaction vessel 11 holding the target 25 in a liquid, wherein the reaction vessel 11 is structured so that while its inner space is divided into an ablation chamber 22 and a recovering chamber 23 by a dividing plate 21 with a flowing opening 24, the target 25 is received and held in the ablation chamber 22 and a finely-pulverizing reaction by ablation is progressed, the liquid containing the finely-pulverized particle generated by the finely-pulverizing reaction in the ablation chamber 22 is introduced into the recovering chamber 23 through the flowing opening 24 of the dividing plate 21.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:要解决的问题:提供一种液相激光烧蚀设备,其烧蚀效率的降低极小,并且可以在稳定状态下产生良好的细粉状颗粒。解决方案:液相激光烧蚀设备的靶标为25具有要被微粉碎的成分的激光振荡装置4通过将激光5照射到靶25上而以原子,分子,离子或团簇的状态排出作为微粉状颗粒的目标成分,以及反应容器11。将反应物11保持在液体中,其中反应容器11的结构使得其内部空间被具有流动开口24的分隔板21划分为消融室22和回收室23,同时接收目标物25并保持在消融室22中并进行通过消融的微粉碎反应,在消融室中包含通过微粉碎反应生成的微粉碎粒子的液体通过分隔板21的流动开口24将22引入到回收室23中。;版权所有:(C)2006,JPO&NCIPI

著录项

  • 公开/公告号JP2006122845A

    专利类型

  • 公开/公告日2006-05-18

    原文格式PDF

  • 申请/专利权人 NARA KIKAI SEISAKUSHO:KK;

    申请/专利号JP20040317045

  • 发明设计人 MACHI KINUYO;TANABE YOSHIAKI;

    申请日2004-10-29

  • 分类号B01J19/12;B82B3/00;

  • 国家 JP

  • 入库时间 2022-08-21 21:56:09

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