The sigma delta modulation device which is improved is disclosed. This modulator 100 uses the micro electric machine system MEMS technology which on-chip LC network 110,118 is joined. The MEMS switch joints with the capacitor and the inductor and network and, cuts off changes the center frequency and the tuning range of sigma delta modulation device, 100 is used in order to remove the active element inside each LC network 110,118. Furthermore, Q of each LC network 110,118 is improved with the use of the MEMS switch, in regard to the former onchitsupushiguma delta modulation device design. Necessity of the active Q reinforcement circuit decreases with the augmentation of Q of each LC network, 110,118 becomes or without, specific filter form inside the looping of modulator 100 is improved. Furthermore, by looping of modulator 100, 146 ', 148 and 148 ' also the strain of the active element 146 is improved. Complete single tip/chip LC sigma derutaanarogudejitaru conversion device 250 is offered by adding deci- meter 252 to the tip/chip.
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