The anhydrous antimony Acid spelter semiconductor gas sensor and the sensor for gas detection which

摘要

PROBLEM TO BE SOLVED: To obtain an antimonic anhydride zinc semiconductor gas sensor which detects various reducing gases such as hydrogen sulfide and to obtain its manufacturing method. ;SOLUTION: In a sensor for gas detection, its gas detection part uses an antimonic anhydride zinc semiconductor. The sensor for gas detection detects hydrogen sulfide gas as a detecting gas. In a manufacturing method for the sensor for gas detection, a zinc compound and colloiclal antimony oxide are mixed to be a ZnO/Sb₂O₅ molar ratio of 0.8 to 1.2 their mixture is then fired at 300 to 680°C, an element substrate is coated with a sol which contains conductive antimoric anhydride zinc obtained by crushing the mixture, and the element substrate is heated and treated at a temperature which exceeds 680°C and which is less than 1000°C.;COPYRIGHT: (C)1999,JPO