Main application of the dual chamber integrated die phase separator for the extreme high vacuum system with the bikoinsutsurumentsuinkoporeteitsudo name which is the American corporate body, is something which is applied on 2003 July 29th as the PCT international application which designates all countries which exclude the United States as specified country.

摘要

It is the phase separator which is used for extreme high vacuum system such as numerator beam epitaxy system. The very low temperature panel is laid out inside the vacuum chamber, the very low temperature shroud field and the phase separator field are included in this very low temperature panel. Liquid nitrogen through the inlet line, is introduced into the very low temperature panel. When temperature of liquid nitrogen rises, evaporates, the nitrogen steam moves to the top inside the shroud. Abbreviation atmospheric pressure steam formation is on liquid nitrogen in the phase separator field of the very low temperature panel, as a result, the nitrogen steam is discharged smoothly from the panel without forming gas burst. In addition, in order to prevent the temperature variation of the very low temperature shroud surface with the change of liquid nitrogen level, the phase separator field is done, the vacuum jacket can raise the pump stability of the very low temperature shroud because of this. With one example which with the numerator beam epitaxy system (MBE) is used, the very low temperature panel is split into the first and second cooling chamber. The first cooling chamber includes liquid nitrogen, surrounds the substrate which is coated. The second cooling chamber seems like the water and the fluid which differs is included, the heat which is generated while operating of the effusion electrolysis cell by surrounding the effusion electrolysis cell, dissipates.