The multiple probes where the power microscope between the non-contact die atoms and the observation

摘要

A non-contact-type atomic microscope including a plurality of probes differing in resonance frequency, an actuator for vibrating the plurality of probes simultaneously, and a drive signal generating circuit for generating a drive signal for the actuator. The drive signal contains a predetermined frequency for vibrating each of the plurality probes. Also, there is a method for observing a surface shape of a sample by using a plurality of probes. The method includes a step of vibrating the plurality of probes simultaneously with a common actuator in a vicinity of their resonance frequencies. A signal for driving the actuator contains a predetermined frequency for vibrating each of the probes.