Microfabrication method based on metal matrix composite technology

摘要

A method of fabricating microstructural components, microparts assemblies and microparts is disclosed. The method includes fabricating a unidirectional metal matrix composite made of materials selected to allow precise etching of different structural elements of the given composite without damage to each other. Cutting a composite to form slices or sections. Etching a matrix entirely out will produce wide assortment of microparts. Partial removal of matrix will form an array of microprotrusions protruding from a substrate. Etching out the microprotrusions cores will form hollow microprotrusions. The method of invention is suitable for fabricating of variety of microcomponents. For example: microneedles—a medical microdevice component having micron features, arrays of high strength micropins and micropunches, and precisely controlled unique microstructural surfaces.