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TECHNIQUES FOR ANALYZING NON-UNIFORM CURVATURES AND STRESSES IN THIN-FILM STRUCTURES ON SUBSTRATES WITH NON-LOCAL EFFECTS
TECHNIQUES FOR ANALYZING NON-UNIFORM CURVATURES AND STRESSES IN THIN-FILM STRUCTURES ON SUBSTRATES WITH NON-LOCAL EFFECTS
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机译:非局部效应的基片上薄膜结构非均匀曲率和应力分析技术
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摘要
Techniques and devices are described to use spatially-varying curvature information of a layered structure to determine stresses at each location with non-local contributions from other locations of the structure. For example, a local contribution to stresses at a selected location on a layered structure formed on a substrate is determined from curvature changes at the selected location and a non-local contribution to the stresses at the selected location is also determined from curvature changes at all locations across the layered structure. Next, the local contribution and the non-local contribution are combined to determine the total stresses at the selected location.
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