AIR VELOCITY DETECTING SENSOR, COOLING FAN AND SEMICONDUCTOR FABRICATION DEVICE CONTROLLER COMPRISING AIR VELOCITY DETECTING SENSOR

摘要

The wind speed sensor is provided . Wind speed sensor includes a main body , made of a metal is formed on the inside of the main fixing part , and is formed on one end of the fixing part , and when the wind speed with a predetermined wind blowing switch which is pushed to the other side of the direction includes a . Wind speed cooling fan is detected and a semiconductor manufacturing apparatus comprising a sensor controller is also provided .