TANSPARENT CONDUCTING THIN FILMS CONSISTING OF ZNO WITH HIGH FIGURE OF MERIT

摘要

The present invention is a TFT-LCD require excellent light transmittance in the visible region and excellent conductivity, PDP, FED , LED, a transparent electrode is used for flat panel displays and solar cells, such as OLED or the electromagnetic wave shielding film on the transparent conductive thin film is used as a filter for, and more particularly, the cationic metal-doped Group III element of the main component of zinc oxide and halogen anionic doping element relates to a zinc oxide based transparent conductive thin film, characterized in that a doping which is at the same time. Zinc oxide based transparent conductive thin film according to the third group of cationic metal element is doped with only zinc oxide based transparent conductive thin film or a high gain index than the halogen group, which is doped with only the anionic element zinc oxide based transparent conductive thin film of the present invention (Figure of merit in order to achieve the effect of providing the electrical conductivity / light absorption coefficient).