Transistor e.g. double diffusion MOS, has cell array with two active transistor cells separated by pitch, in which temperature sensor and transistor cell are located in close distance

摘要

The transistor has a cell array with two active transistor cells separated by a pitch, and a temperature sensor in proximate to the cell array. An isolation structure with an isolation trench (70) electrically isolates the temperature sensor from the cell array. The temperature sensor and the transistor cell are located in closest distance, approximately to the pitch between active transistor cells within the cell array.