Double membrane valve has first magnetic valve with gas inlet through which gas can enter first back pressure chamber between first membrane and housing section, and gas outlet blocking path to second back pressure chamber

摘要

The double membrane valve has a first magnetic valve (21) with a gas inlet (211) through which gas can enter via a first passage (171) into a first back pressure chamber (152) between a first membrane (141) and middle housing section (12), and a gas outlet (212) normally closed through which the path to a second back pressure chamber (154) between a second membrane (144) and the middle housing section is blocked. A second magnetic valve (22) has a gas inlet (221) through which a second passage (172) is connected to a second gas inlet chamber (153), whereby a flow regulator (30) is installed in the second passage.