Substrate cutting apparatus for manufacture of liquid crystal display device has beam splitter that splits condensed femtosecond laser beams from condenser lenses and radiates split femtosecond laser beam at different positions on substrate

摘要

A beam splitter (210) splits a femtosecond laser beam (201) from a laser oscillator (200) into two femtosecond laser beams (201a,201b). Two condenser lenses (230,250) of different focal depths respectively condense the split femtosecond laser beams. Another beam splitter (260) splits the condensed femtosecond laser beams from the condenser lens and irradiates the split femtosecond laser beams at different positions on a substrate to be cut. An independent claim is also included for a substrate cutting method.