Method and apparatus for forming a plurality of laser beams with uv - wavelength, and the laser processing apparatus

摘要

The present invention provides a method and a device for forming a plurality of ultraviolet - wavelengths - laser beams and a laser - processing device, in which, in order to reduce the running costs, the machining efficiency due to a simple maintenance and inspection can be improved, while a deterioration of the wavelengths reaction means can be avoided. A of a laser oscillator emission laser beam having a wavelength in the near infrared is distributed by means of a laser unit is divided into a plurality of laser beams. Each branch - laser beam is formed by a wavelengths reaction before the direction of the partially in a laser beam whose wavelength is equal to half the near infra-red - wavelength is converted. By means of the different wavelengths reaction is in front of the direction of the branch - laser beam and the laser beam whose wavelength is equal to half the near infra-red - wavelength is, an ultraviolet - laser beam whose wavelength is equal to one third of the near infra-red - wavelength is formed, wherein both of the branch - laser beam as well as the laser beam whose wavelength is equal to half the near infra-red - wavelength is, of the wavelengths reaction are output in the direction of. The ultraviolet - laser beam is a wave lengths of the device by means of separation is extracted and fed to a section to be machined.