POSITIVE RESIST COMPOSITION FOR CIRCUIT SUBSTRATE, POSITIVE DRY FILM FOR CIRCUIT SUBSTRATE AND METHOD FOR PRODUCING CIRCUIT SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a positive resist composition and a positive dry film for production of a circuit substrate, which are a positive resist composition and a positive dry film having such sensitivity and resolution as to achieve higher definition and higher precision of a wiring pattern, and excellent also in adhesion to a substrate in pattern formation and strippability from the substrate after pattern formation, and a method for producing a circuit substrate using the same.;SOLUTION: The positive resist composition for a circuit substrate and the positive dry film for a circuit substrate comprise (A) a vinyl polymer having a monomer unit having an alkali-soluble group blocked with an alkyl vinyl ether, (B) a photothermal conversion material capable of generating heat under an active energy beam, and (C) an acid generator capable of generating an acid under heat. The method for producing a circuit substrate using the same is also provided.;COPYRIGHT: (C)2007,JPO&INPIT