MASK BLANK HOUSING CASE, METHOD FOR HOUSING MASK BLANK, AND MASK BLANK HOUSED BODY

摘要

PPROBLEM TO BE SOLVED: To provide a mask blank housing case that has both of visibility for checking inside the case and light shielding property suitable for a mask blank having a resist film formed thereon and can maintain stable resist performance for forming a desired mask pattern. PSOLUTION: The mask blank housing case is used for housing a mask blank having at least a thin film for forming a transfer pattern on a substrate, wherein at least a part of the case has a light transmitting property in such a content that the housed material is visible from outside the case, and substantially blocks light at a wavelength of 550 nm or shorter. The housing case substantially transmits light at a wavelength of 600 nm or longer. PCOPYRIGHT: (C)2007,JPO&INPIT