The analysis tube is jointed to the inlet of the operational mannered null high vacuum blower

摘要

PROBLEM TO BE SOLVED: To provide an operation method for saving power in a reverse diffusion type helium leak detector.;SOLUTION: For a fore-line valve and a fore pump in test waiting after an initial activation is made and a fore-line is set to be in a high vacuum state, the fore-line valve is closed down and then the operation of the fore pump is stopped (step 1). Then, when pressure in an analysis tube increases in the step 1 to reach a pressure increase limit value, the operation of the fore pump is resumed and the fore-line valve is opened (step 2). Then, when the pressure in the analysis tube descends by the step 2 and reaches a specific value, the fore-line valve is closed down and the operation of the fore pump is stopped (step 3). Cycles in the steps 1-3 are repeated by an intermittent operation, thus saving consumption power regarding the fore-line valve and the fore pump.;COPYRIGHT: (C)2004,JPO