The material detection sensor in the liquid and material detection device null in the liquid which uses

摘要

The physical detection sensor in the liquid which makes that the detection object substance in the little liquid is measured in high accuracy possible, uses the surface acoustic wave element and the physical detection device in the liquid which uses that are offered. It possesses open part 2a and 2b, the based baseplate 2 where the electrode land is provided on the one hand on the surface and, it has with the SAW element 6,7 where, it can provide the sensing section which at least possesses one IDT electrode on the one hand on the surface in order for the sensing section of SAW element 6,7 to face to based baseplate 2 open part 2a and 2b, SAW element 6,7 it is mounted with flip chip bonding construction method making use of the bump electrode, at least one sensing section, is covered by the reaction membrane 13 which is connected with the detection object substance, physical detection sensor 1 in the liquid.