TEMPERATURE ESTIMATING DEVICE, TEMPERATURE CONTROL DEVICE, TEMPERATURE ESTIMATING METHOD, TEMPERATURE CONTROL METHOD, TEMPERATURE ESTIMATING PROGRAM, AND TEMPERATURE CONTROL PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a temperature estimating device capable of estimating temperature of an object at a high accuracy, a temperature control device, a temperature estimating method, a temperature control method, a temperature estimating program, and a temperature control program.;SOLUTION: The temperature estimating device comprises a reference point temperature acquiring section for acquiring temperature at a reference point of a substrate, a first temperature calculation section for estimating the temperature at the object according to a heat parameter and the temperature of the reference point, a second temperature calculation section for estimating the temperature at the reference point according to the heat parameter and the estimated temperature of the object, and a heat parameter correction section for correcting the heat parameter based on the temperature and estimated temperature at the reference point. Whenever the heat parameter is corrected in a parameter correction section, the estimated temperature of the object and estimated temperature at the reference point are re-calculated using the corrected heat parameter. Whenever the estimated temperature of the reference point is re-calculated, the heat parameter is corrected.;COPYRIGHT: (C)2007,JPO&INPIT