The process which it pressurizes calcines the aforementioned ceramic generation form embedding

摘要

PROBLEM TO BE SOLVED: To provide a ceramic heater having a stable resistance temperature coefficient, and in result, capable of a steady ignition detection when an integrated ceramic heater with a ceramic heater having a stable resistance value and flame detection is used for a long period.;SOLUTION: In a ceramic heater burying a heating resistance element made of a high melting-point metal or its conductive ceramics in a silicon nitride ceramic, and a lead part to supply power to the heater resistance element, variation of the resistance temperature coefficient of the heating resistive element is controlled not to exceed 25%.;COPYRIGHT: (C)2003,JPO