The pushing overpowering the pushing pressure heating heater and

摘要

PROBLEM TO BE SOLVED: To provide a pressure heater capable of improving the yield by efficiently joining an electrode of a semiconductor bear chip to a wiring conductor of a wiring board in a short period of time by enabling the rapid rising of temperature and by reducing the variation of temperature distribution of a processing surface of the semiconductor bear chip.;SOLUTION: This pressure heater comprises with a ceramic heater for pushing and heating an object to be heated, an adiabator for mounting the ceramic heater and a base integrating these members and combining them with other members. A plurality of protruded parts are formed on the surface of the adiabator, a contact area with the ceramic heater of each protruded part is 0.5%-15% of the area of the lower surface of the ceramic heater, and the total of the areas of the parts of the protruded parts contacting with the ceramic heater is 4%-50% of the area of the lower surface of the ceramic heater.;COPYRIGHT: (C)2004,JPO