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Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method
Method of determining movement sequence, alignment apparatus, method and apparatus of designing optical system, and medium in which program realizing the designing method
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机译:确定运动顺序的方法,对准装置,设计光学系统的方法和装置以及其中实现该设计方法的程序的介质
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摘要
A determining method of movement sequence and a positioning apparatus of the invention are arranged in such a manner that, in order to measure positions of plural marks as being measurement targets provided on a wafer within a shorter time, a group including executable movement sequences is generated out of a group of movement sequence candidates, each indicating a measurement order of these marks, and a movement sequence that accomplishes a movement operation between the marks within the shortest time is obtained from the group thus generated. For efficiently searching an optical system as a globally optimal solution within a shorter computation time, independently of an initial solution given, a designing method of optical system of the invention obtains the optimal solution of the optical system to be designed, using an evolutionary computation method (genetic algorithm) having a genetic operator for handling continuous values explicitly.
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