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Growing 110 silicon on 001 oriented substrate with rare-earth oxide buffer film
Growing 110 silicon on 001 oriented substrate with rare-earth oxide buffer film
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机译:用稀土氧化物缓冲膜在[001]取向的衬底上生长[110]硅
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摘要
An assembly and method of making the same wherein the assembly incorporates a rare-earth oxide film to form a [110] crystal lattice orientation semiconductor film. The assembly comprises a substrate, a rare-earth oxide film formed on the substrate, and a [110]-oriented semiconductor film formed on the rare-earth oxide film. The rare-earth oxide film having a [110] crystal lattice orientation. The substrate has a [001] crystal lattice orientation.
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