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Functional structural element, method of manufacturing functional structural element, and substrate for manufacturing functional structural body

机译:功能性结构元件,功能性结构元件的制造方法以及功能性结构体的制造基板

摘要

The functional structural element includes: a substrate member which has a surface made of directionally solidified silicon; and a functional structural body which is made of a functional material and is formed on the surface of the substrate member.
机译:该功能结构元件包括:基板构件,其表面由定向凝固的硅制成;和功能结构体由功能材料制成并形成在基板构件的表面上。

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