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Functional structural element, method of manufacturing functional structural element, and substrate for manufacturing functional structural body
Functional structural element, method of manufacturing functional structural element, and substrate for manufacturing functional structural body
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机译:功能性结构元件,功能性结构元件的制造方法以及功能性结构体的制造基板
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摘要
The functional structural element includes: a substrate member which has a surface made of directionally solidified silicon; and a functional structural body which is made of a functional material and is formed on the surface of the substrate member.
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