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Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access
Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access
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机译:椭偏仪或旋光仪等系统,在环境控制室中具有多个检测器元件检测器,包括安全的样品通道
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摘要
A spectrophotometer, ellipsometer or polarimeter or the like system with a spectroscopic source of wavelengths and a detector with multiple detector elements for simultaneous monitoring of a number of wavelengths in an environmental control chamber which optionally provides for secured sample entry, and methodology of use.
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