SYSTEM AND METHOD FOR AUTOMATICALLY GENERATING A TOOLING SPECIFICATION USING A LOGICAL OPERATIONS UTILITY THAT CAN BE USED TO GENERATE A PHOTOMASK ORDER

摘要

, for analysis,of the tooling specification, and the photomask design may be simulated using the tooling specification. After receiving the analysis results, the photomask customer's computer system generates the photomask order based on the tooling specification. The photomask order is then sent to the compute! system of a photomask manufacturer for manufacture of the photomask. The tooling specification generating system may be a stand-alone system or be integrated with a photomask order generating system.