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METHOD FOR PRECISE MOLDING AND ALIGNMENT OF STRUCTURES ON A SUBSTRATE USING A STRETCHABLE MOLD
METHOD FOR PRECISE MOLDING AND ALIGNMENT OF STRUCTURES ON A SUBSTRATE USING A STRETCHABLE MOLD
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机译:使用可拉伸模具在基板上精确进行结构造型和对齐的方法
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摘要
A method for molding and aligning microstructures on a patterned substrateusing a microstructured mold. A slurry containing amixture of a ceramic powder and a curable fugitive binder is placed betweenthe microstructure of a stretchable mold and a patternedsubstrate. The mold can be stretched to align the microstructure of the moldwith a predetermined portion of the patterned substrate. Theslurry is hardered between the mold and the substrate. The mold is thenremoved to leave microstructures adhered to the substrate andaligned with the pattern of the substrate. The microstructures can bethermally heated to removed the binder and optimally fired to sinterthe ceramic powder.
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