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METHOD FOR PRECISE MOLDING AND ALIGNMENT OF STRUCTURES ON A SUBSTRATE USING A STRETCHABLE MOLD

机译:使用可拉伸模具在基板上精确进行结构造型和对齐的方法

摘要

A method for molding and aligning microstructures on a patterned substrateusing a microstructured mold. A slurry containing amixture of a ceramic powder and a curable fugitive binder is placed betweenthe microstructure of a stretchable mold and a patternedsubstrate. The mold can be stretched to align the microstructure of the moldwith a predetermined portion of the patterned substrate. Theslurry is hardered between the mold and the substrate. The mold is thenremoved to leave microstructures adhered to the substrate andaligned with the pattern of the substrate. The microstructures can bethermally heated to removed the binder and optimally fired to sinterthe ceramic powder.
机译:用于在图案化的基板上模制和对准微结构的方法使用微结构模具。含有将陶瓷粉末和可固化的逃逸性粘合剂的混合物置于可拉伸模具和图案的微观结构基质。可以拉伸模具以对准模具的微观结构具有图案化衬底的预定部分。的浆料在模具和基材之间硬化。然后模具去除以使微结构粘附在基材上,并与基板的图案对齐。微观结构可以是热加热以去除粘合剂,并以最佳方式烧结陶瓷粉。

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