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Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced
Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced
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机译:使用负性光致抗蚀剂和由此产生的微结构母版来通过基板来微结构化微结构的系统和方法
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摘要
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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