FABRICATION METHOD OF COMPLICATED METAL OXIDE DIELECTRIC FILM, AND COMPLICATED METAL OXIDE DIELECTRIC FILM

摘要

A composite metal oxide dielectric film and a method of manufacturing the same are provided to easily form a dielectric having good dielectric property in a film structure while performing the entire process at a low temperature. An amorphous film containing at least one of the metallic elements is formed on a substrate(S12). A hydrothermal solution where a precursor of the other one of the metallic elements is mixed is prepared(S14). The amorphous film is immersed into the hydrothermal solution(S16). The amorphous film is hydrothermally treated so that the remaining element of the metallic elements is synthesized to the amorphous film, thereby forming a crystallized composite metal oxide film. The substrate is one selected from the group consisting of a foil, a wafer and a copper clad laminate substrate.