Testing routine process for component of vacuum coating unit maintenance or testing routine is applied to partial process automatically useful for industrial series production of coated parts

摘要

Testing routine process for at least one component of a vacuum coating unit where during down time of a partial production process a maintenance or testing routine is applied to the partial process automatically, using a characteristic value stored in a data bank, and if a deviation from the set value of a test parameter or an error function is detected a report on the situation is generated. The coating unit is used for deposition of coatings by PACVD (plasma assisted chemical vapor deposition) or PICVD (plasma impulse chemical vapor deposition). An independent claim is included for a vacuum coating unit as described above.